Reducing lithography nanopatterns to 6 nanometers in size

NanoNed researcher Vadim Sidorkin is the first in the world to succeed in patterning a substrate with markings only 6 nanometres in size and only 14 nanometres apart. A spacing of 14 nanometres, would increase in the capacity of the memory chips of, for example, new generation mobile phones tenfold.

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