Complex 3D-nano patterns with indentation lithography and piezo technology

A collaboration between the Whitesides Group at Harvard University and CSM Instruments has culminated in an important advance in lithography of different materials at the nanoscale. The motivation for this development was the ability to produce unique lithographical patterns of different shapes and sizes for use in research applications (e.g. lab-on-a-chip) where conventional techniques such as electron-beam lithography (EBL) and photolithography cannot be used.

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