{"id":40625,"date":"2011-10-23T15:43:00","date_gmt":"2011-10-23T15:43:00","guid":{"rendered":"http:\/\/euvolution.com\/futurist-transhuman-news-blog\/imec-uses-si-nano-pillar-test-structures-to-evaluate-advanced-cleaning-and-drying-techniques\/"},"modified":"2011-10-23T15:43:00","modified_gmt":"2011-10-23T15:43:00","slug":"imec-uses-si-nano-pillar-test-structures-to-evaluate-advanced-cleaning-and-drying-techniques","status":"publish","type":"post","link":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/nanotechnology\/imec-uses-si-nano-pillar-test-structures-to-evaluate-advanced-cleaning-and-drying-techniques.php","title":{"rendered":"Imec uses Si nano-pillar test structures to evaluate advanced cleaning and drying techniques"},"content":{"rendered":"<p>Imec in collaboration with Lam Research presents a new method for the quantitative evaluation of wafer drying techniques. The method uses Si nano-pillar test structures in combination with top-down scanning electron microscopy (TD-SEM) inspection.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Imec in collaboration with Lam Research presents a new method for the quantitative evaluation of wafer drying techniques. The method uses Si nano-pillar test structures in combination with top-down scanning electron microscopy (TD-SEM) inspection.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"limit_modified_date":"","last_modified_date":"","_lmt_disableupdate":"","_lmt_disable":"","footnotes":""},"categories":[7],"tags":[],"class_list":["post-40625","post","type-post","status-publish","format-standard","hentry","category-nanotechnology"],"modified_by":null,"_links":{"self":[{"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/posts\/40625"}],"collection":[{"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/comments?post=40625"}],"version-history":[{"count":0,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/posts\/40625\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/media?parent=40625"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/categories?post=40625"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/tags?post=40625"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}