{"id":40623,"date":"2011-10-23T15:43:00","date_gmt":"2011-10-23T15:43:00","guid":{"rendered":"http:\/\/euvolution.com\/futurist-transhuman-news-blog\/significant-step-towards-engineering-contact-modules-with-vertical-carbon-nanotube-interconnects\/"},"modified":"2011-10-23T15:43:00","modified_gmt":"2011-10-23T15:43:00","slug":"significant-step-towards-engineering-contact-modules-with-vertical-carbon-nanotube-interconnects","status":"publish","type":"post","link":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/nanotechnology\/significant-step-towards-engineering-contact-modules-with-vertical-carbon-nanotube-interconnects.php","title":{"rendered":"Significant step towards engineering contact modules with vertical carbon nanotube interconnects"},"content":{"rendered":"<p>Imec researchers, in collaboration with Tokyo Electron, have successfully integrated and characterized carbon nanotubes (CNT) into 150nm contact holes with a TiN underlayer and a Cu single damascene top contact module. The process steps are CMOS-compatible and the platform is designed for fast and automatic electrical testing and for benchmarking different CNT recipes and process conditions.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Imec researchers, in collaboration with Tokyo Electron, have successfully integrated and characterized carbon nanotubes (CNT) into 150nm contact holes with a TiN underlayer and a Cu single damascene top contact module. The process steps are CMOS-compatible and the platform is &hellip; <a href=\"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/nanotechnology\/significant-step-towards-engineering-contact-modules-with-vertical-carbon-nanotube-interconnects.php\">Continue reading <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"limit_modified_date":"","last_modified_date":"","_lmt_disableupdate":"","_lmt_disable":"","footnotes":""},"categories":[7],"tags":[],"class_list":["post-40623","post","type-post","status-publish","format-standard","hentry","category-nanotechnology"],"modified_by":null,"_links":{"self":[{"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/posts\/40623"}],"collection":[{"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/comments?post=40623"}],"version-history":[{"count":0,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/posts\/40623\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/media?parent=40623"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/categories?post=40623"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/tags?post=40623"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}