{"id":26476,"date":"2010-07-30T08:08:49","date_gmt":"2010-07-30T08:08:49","guid":{"rendered":"http:\/\/euvolution.com\/futurist-transhuman-news-blog\/sematech-and-carl-zeiss-demonstrate-mask-pattern-alignment-and-registration-to-enable-double-patterning-lithography\/"},"modified":"2010-07-30T08:08:49","modified_gmt":"2010-07-30T08:08:49","slug":"sematech-and-carl-zeiss-demonstrate-mask-pattern-alignment-and-registration-to-enable-double-patterning-lithography","status":"publish","type":"post","link":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/nanotechnology\/sematech-and-carl-zeiss-demonstrate-mask-pattern-alignment-and-registration-to-enable-double-patterning-lithography.php","title":{"rendered":"SEMATECH and Carl Zeiss Demonstrate Mask Pattern Alignment and Registration to Enable Double Patterning Lithography"},"content":{"rendered":"<p>Next generation overlay metrology system improves photomask registration measurement to advance manufacturing.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Next generation overlay metrology system improves photomask registration measurement to advance manufacturing.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"limit_modified_date":"","last_modified_date":"","_lmt_disableupdate":"","_lmt_disable":"","footnotes":""},"categories":[7],"tags":[],"class_list":["post-26476","post","type-post","status-publish","format-standard","hentry","category-nanotechnology"],"modified_by":null,"_links":{"self":[{"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/posts\/26476"}],"collection":[{"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/comments?post=26476"}],"version-history":[{"count":0,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/posts\/26476\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/media?parent=26476"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/categories?post=26476"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.euvolution.com\/futurist-transhuman-news-blog\/wp-json\/wp\/v2\/tags?post=26476"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}